Open AccessA Sensitive Positive-Working Cross-Linked Methacrylate Electron Resist
Author(s) -
E. D. Roberts
Publication year - 1982
Publication title -
acs symposium series
Language(s) - Uncategorized
Resource type - Book series
SCImago Journal Rank - 0.169
H-Index - 64
eISSN - 1947-5918
pISSN - 0097-6156
DOI - 10.1021/bk-1982-0184.ch001
Subject(s) - resist , methacrylate , methacrylic acid , polymer chemistry , methyl methacrylate , copolymer , polymer , chemistry , side chain , materials science , organic chemistry , layer (electronics)
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