Open AccessPhysical Sputtering: A Discussion of Experiment and Theory
Author(s) -
Harold F. Winters
Publication year - 1976
Publication title -
advances in chemistry series
Language(s) - English
Resource type - Book series
ISSN - 0065-2393
DOI - 10.1021/ba-1976-0158.ch001
Subject(s) - sputtering , amorphous solid , crystallite , materials science , ion , atomic physics , chemistry , nanotechnology , physics , metallurgy , thin film , crystallography , organic chemistry
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