Open AccessPorous Silicon Preparation by Electrochemical Etching in Ionic Liquids
Author(s) -
Evgeniya A. Saverina,
Daria Y. Zinchenko,
Sofia D. Farafonova,
Alexey S. Galushko,
А. А. Новиков,
Maxim V. Gorbachevskii,
Valentine P. Ananikov,
Mikhail P. Egorov,
Viatcheslav Jouikov,
Mikhail A. Syroeshkin
Publication year - 2020
Publication title -
acs sustainable chemistry and engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.878
H-Index - 109
ISSN - 2168-0485
DOI - 10.1021/acssuschemeng.0c03133
Subject(s) - ionic liquid , hexafluorophosphate , etching (microfabrication) , porous silicon , tetrafluoroborate , silicon , chemical engineering , materials science , porosity , inorganic chemistry , chemistry , analytical chemistry (journal) , nanotechnology , organic chemistry , optoelectronics , catalysis , layer (electronics) , engineering
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