Photomask-Free, Direct Selective Electroless Deposition on Glass by Controlling Surface Hydrophilicity
Author(s) -
Kuan-Ting Wang,
WeiYen Wang,
TzuChien Wei
Publication year - 2019
Publication title -
acs omega
Language(s) - English
Resource type - Journals
ISSN - 2470-1343
DOI - 10.1021/acsomega.9b00259
Subject(s) - silane , photomask , substrate (aquarium) , materials science , photolithography , surface modification , laser ablation , deposition (geology) , silanes , contact angle , chemical engineering , aqueous solution , nanotechnology , layer (electronics) , laser , composite material , chemistry , organic chemistry , optics , resist , paleontology , oceanography , physics , sediment , geology , engineering , biology
This paper reports a new approach to realize direct selective electroless deposition (ELD) without the requirement of photolithography. This method involves sequential silane-compound modifications in which the first modification creates a hydrophobic surface on the TiO 2 -coated glass using a fluorine-rich alkoxysilane compound, followed by a laser ablation to create the pattern. Then, the entire substrate is immersed into an aqueous solution containing amino-silane equipped Pd nanoparticles for the second modification. Because most substrate surface is hydrophobic, the amino-silane-equipped Pd catalysts can only graft on the laser-ablated zone to accomplish selective ELD.
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