Wafer-Scale Thermophoretic Dry Deposition of Single-Walled Carbon Nanotube Thin Films | Zendy

Patrik Laiho | Zendy; Mahdi Rafiee | Zendy; Yongping Liao | Zendy; Aqeel Hussain | Zendy; ErXiong Ding | Zendy; Esko I. Kauppinen | Zendy

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Wafer-Scale Thermophoretic Dry Deposition of Single-Walled Carbon Nanotube Thin Films

Author(s) -

Patrik Laiho,

Mahdi Rafiee,

Yongping Liao,

Aqeel Hussain,

ErXiong Ding,

Esko I. Kauppinen

Publication year - 2018

Publication title -

acs omega

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.779

H-Index - 40

ISSN - 2470-1343

DOI - 10.1021/acsomega.7b01869

Subject(s) - carbon nanotube , transmittance , wafer , materials science , aerosol , nanomaterials , nanotechnology , deposition (geology) , fabrication , polymer , optoelectronics , thin film , composite material , chemistry , medicine , paleontology , alternative medicine , organic chemistry , pathology , sediment , biology

We report the direct and dry deposition of transparent conducting films (TCFs) of aerosol-synthesized single-walled carbon nanotubes (SWNTs) using a thermophoretic precipitator (TP) designed for the uniform and efficient deposition of aerosol-synthesized nanomaterials on 50 mm wafers or similarly sized polymer substrates. The optical and electrical performance of the fabricated TCFs match or surpass the published results achieved using a filter-based collection of aerosol-synthesized SWNTs, and TCFs with sheet resistances of 60 Ω/sq. at 87.8% transmittance and 199 Ω/sq. at 96% transmittance on flexible polymer substrates are demonstrated. The precipitator design is immediately applicable in roll-to-roll fabrication of SWNT TCFs or other functional coatings of aerosol-synthesized nanomaterials.

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