Open AccessHeteroepitaxial Growth of an Ultrathin β-Ga2O3 Film on a Sapphire Substrate Using Mist CVD with Fluid Flow Modeling
Author(s) -
Abhay Kumar Mondal,
Revathy Deivasigamani,
Loh Kean Ping,
Muhammad Aniq Shazni Mohammad Haniff,
Boon Tong Goh,
Ray−Hua Horng,
Mohd Ambri Mohamed
Publication year - 2022
Publication title -
acs omega
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.779
H-Index - 40
ISSN - 2470-1343
DOI - 10.1021/acsomega.2c04888
Subject(s) - materials science , mist , sapphire , thin film , chemical vapor deposition , epitaxy , substrate (aquarium) , crystallite , gallium , optoelectronics , nanotechnology , layer (electronics) , optics , metallurgy , laser , oceanography , physics , geology , meteorology