Open AccessHeteroepitaxial Growth of an Ultrathin β-Ga2O3 Film on a Sapphire Substrate Using Mist CVD with Fluid Flow Modeling
Author(s) -
Abhay Kumar Mondal,
Revathy Deivasigamani,
Loh Kean Ping,
Muhammad Aniq Shazni Mohammad Haniff,
Boon Tong Goh,
RayHua Horng,
Mohd Ambri Mohamed
Publication year - 2022
Publication title -
acs omega
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.779
H-Index - 40
ISSN - 2470-1343
DOI - 10.1021/acsomega.2c04888
Subject(s) - mist , sapphire , materials science , substrate (aquarium) , flow (mathematics) , optoelectronics , optics , mechanics , physics , geology , laser , oceanography , meteorology
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