Open AccessWafer-Scale Fabrication of Silicon Nanocones via Controlling Catalyst Evolution in All-Wet Metal-Assisted Chemical Etching
Author(s) -
Chen-Yu Bian,
Bingchang Zhang,
Zhenghe Zhang,
Hui Chen,
Dake Zhang,
Shaojun Wang,
Jing Ye,
Le He,
Jiansheng Jie,
Xiaohong Zhang
Publication year - 2022
Publication title -
acs omega
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.779
H-Index - 40
ISSN - 2470-1343
DOI - 10.1021/acsomega.1c05790
Subject(s) - wafer , materials science , nanotechnology , etching (microfabrication) , fabrication , silicon , isotropic etching , nanostructure , nanoscopic scale , nanowire , optoelectronics , medicine , alternative medicine , pathology , layer (electronics)
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