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A robust and reliable method for enhancing the photoluminescence (PL) of multilayer MoS 2 is demonstrated using an oxygen plasma treatment process followed by laser exposure. Here, the plasma and laser treatments result in an indirect-to-direct band gap transition. The oxygen plasma creates a slight decoupling of the layers and converts some of the MoS 2 to MoO 3 . Subsequent laser irradiation further oxidizes the MoS 2 to MoO 3 , as confirmed via X-ray photoelectron spectroscopy, and results in localized regions of brightly luminescent MoS 2 monolayer triangular islands as seen in high-resolution transmission electron microscopy images. The PL lifetimes are found to decrease from 494 to 190 ps after plasma and laser treatment, reflecting the smaller size of the MoS 2 grains/regions. Atomic force microscopic imaging shows a 2 nm increase in thickness of the laser-irradiated regions, which provides further evidence of the MoS 2 being converted to MoO 3 .

Formation of Brightly Luminescent MoS2 Nanoislands from Multilayer Flakes via Plasma Treatment and Laser Exposure

Formation of Brightly Luminescent MoS₂ Nanoislands from Multilayer Flakes via Plasma Treatment and Laser Exposure