Growth of Bi2O3 Films by Thermal- and Plasma-Enhanced Atomic Layer Deposition Monitored with Real-Time Spectroscopic Ellipsometry for Photocatalytic Water Splitting
Author(s) -
M. Müller,
Kristina Komander,
Christian Höhn,
Roel van de Krol,
Aafke C. Bronneberg
Publication year - 2019
Publication title -
acs applied nano materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.227
H-Index - 29
ISSN - 2574-0970
DOI - 10.1021/acsanm.9b01261
Subject(s) - ellipsometry , atomic layer deposition , bismuth , amorphous solid , layer (electronics) , materials science , analytical chemistry (journal) , plasma , monolayer , deposition (geology) , refractive index , reactivity (psychology) , thin film , chemistry , nanotechnology , crystallography , optoelectronics , organic chemistry , medicine , paleontology , physics , alternative medicine , quantum mechanics , pathology , sediment , metallurgy , biology
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