Open AccessGraphene Membranes for Hall Sensors and Microphones Integrated with CMOS-Compatible Processes
Author(s) -
Sebastian Wittmann,
Christoph Glacer,
Stefan Wagner,
Stephan Pindl,
Max C. Lemme
Publication year - 2019
Publication title -
acs applied nano materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.227
H-Index - 29
ISSN - 2574-0970
DOI - 10.1021/acsanm.9b00998
Subject(s) - graphene , materials science , cmos , optoelectronics , microelectromechanical systems , substrate (aquarium) , back end of line , membrane , hall effect , nanotechnology , electrical engineering , electrical resistivity and conductivity , engineering , chemistry , oceanography , dielectric , geology , biochemistry
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