Open AccessNanometer-Thick SiN Films as Gas Barrier Coatings Densified by Vacuum UV Irradiation
Author(s) -
Tatsuki Sasaki,
Lina Sun,
Yu Kurosawa,
Tatsuhiro Takahashi,
Yoshiyuki Suzuri
Publication year - 2021
Publication title -
acs applied nano materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.227
H-Index - 29
ISSN - 2574-0970
DOI - 10.1021/acsanm.1c01862
Subject(s) - materials science , x ray photoelectron spectroscopy , nanometre , irradiation , hydrogen , thin film , nanotechnology , fabrication , chemical engineering , analytical chemistry (journal) , composite material , chemistry , organic chemistry , physics , medicine , alternative medicine , pathology , nuclear physics , engineering
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