Open AccessHydrogen-Mediated CVD Epitaxy of Graphene on SiC: Implications for Microelectronic Applications
Author(s) -
Zouhour Ben Jabra,
I. Berbézier,
Adrien Michon,
Mathieu Koudia,
Elie Assaf,
A. Ronda,
P. Castrucci,
M. De Crescenzi,
Holger Vach,
Mathieu Abel
Publication year - 2021
Publication title -
acs applied nano materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.227
H-Index - 29
ISSN - 2574-0970
DOI - 10.1021/acsanm.1c00082
Subject(s) - x ray photoelectron spectroscopy , epitaxy , chemical vapor deposition , nucleation , microelectronics , graphene , materials science , wafer , nanotechnology , hydrogen , desorption , analytical chemistry (journal) , chemistry , chemical engineering , layer (electronics) , organic chemistry , adsorption , chromatography , engineering
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