Open AccessRealization of Ultrahigh Quality InGaN Platelets to be Used as Relaxed Templates for Red Micro-LEDs
Author(s) -
Zhaoxia Bi,
Taiping Lü,
Jovana Colvin,
Elis Sjögren-Levin,
Neimantas Vainorius,
Anders Gustafsson,
Jonas Johansson,
Rainer Timm,
Filip Lenrick,
Reine Wallenberg,
Bo Monemar,
Lars Samuelson
Publication year - 2020
Publication title -
acs applied materials and interfaces
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 2.535
H-Index - 228
eISSN - 1944-8252
pISSN - 1944-8244
DOI - 10.1021/acsami.0c00951
Subject(s) - materials science , light emitting diode , indium , optoelectronics , polishing , epitaxy , plane (geometry) , diode , indium gallium nitride , gallium nitride , nanotechnology , composite material , layer (electronics) , geometry , mathematics
In this work, arrays of predominantly relaxed InGaN platelets with indium contents of up to 18%, free from dislocations and offering a smooth top c -plane, are presented. The InGaN platelets are grown by metal-organic vapor phase epitaxy on a dome-like InGaN surface formed by chemical mechanical polishing of InGaN pyramids defined by 6 equivalent {101̅1} planes. The dome-like surface is flattened during growth, through the formation of bunched steps, which are terminated when reaching the inclined {101̅1} planes. The continued growth takes place on the flattened top c -plane with single bilayer surface steps initiated at the six corners between the c -plane and the inclined {101̅1} planes, leading to the formation of high-quality InGaN layers. The top c -plane of the as-formed InGaN platelets can be used as a high-quality template for red micro light-emitting diodes.
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