Open AccessSpectroscopic Ellipsometry Study on Tuning the Electrical and Optical Properties of Zr-Doped ZnO Thin Films Grown by Atomic Layer Deposition
Author(s) -
Carolina Bohórquez,
Hicham Bakkali,
Juan J. Delgado,
E. Blanco,
Manuel Herrera,
M. Domı́nguez
Publication year - 2022
Publication title -
acs applied electronic materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.379
H-Index - 4
ISSN - 2637-6113
DOI - 10.1021/acsaelm.1c01026
Subject(s) - ellipsometry , materials science , doping , analytical chemistry (journal) , atomic layer deposition , thin film , permittivity , drude model , dielectric , sapphire , variable range hopping , optoelectronics , optics , nanotechnology , chemistry , laser , physics , chromatography , thermal conduction , composite material
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