Open AccessMicro–Nanostructured TiN Thin Film: Synthesis from a Photo-Patternable TiO2 Sol–Gel Coating and Rapid Thermal Nitridation
Author(s) -
Arnaud Valour,
Maria Alejandra Usuga Higuita,
Nicolas CrespoMonteiro,
Stéphanie Reynaud,
Marion Hochedel,
Damien Jamon,
Christophe Donnet,
Yves Jourlin
Publication year - 2020
Publication title -
the journal of physical chemistry c
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.401
H-Index - 289
eISSN - 1932-7455
pISSN - 1932-7447
DOI - 10.1021/acs.jpcc.0c07157
Subject(s) - materials science , tin , titanium nitride , high resolution transmission electron microscopy , raman spectroscopy , nanotechnology , thin film , nitride , optoelectronics , chemical engineering , transmission electron microscopy , optics , layer (electronics) , metallurgy , physics , engineering
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