Analysis of Oxygen and Nitrogen Redistribution at Interfaces of HfO2 with Laminate TiN/TiAl/TiN Electrodes
Author(s) -
Aleksei S. Konashuk,
Е. О. Филатова,
Sergei S. Sakhonenkov,
Nadiia Kolomiiets,
Valeri Afanas’ev
Publication year - 2020
Publication title -
the journal of physical chemistry c
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.401
H-Index - 289
eISSN - 1932-7455
pISSN - 1932-7447
DOI - 10.1021/acs.jpcc.0c04183
Subject(s) - tin , materials science , x ray photoelectron spectroscopy , titanium nitride , redistribution (election) , nitride , metallurgy , nitrogen , composite material , chemical engineering , layer (electronics) , chemistry , organic chemistry , politics , political science , law , engineering
The physicochemical nature of the change in the effective work function (EWF) of aluminum doped TiN (using TiN/TiAl/TiN laminate structure) was studied by X-ray photoelectron spectroscopy with high...
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