Open AccessTwo-Dimensional Crystal Grain Size Tuning in WS2 Atomic Layer Deposition: An Insight in the Nucleation Mechanism
Author(s) -
Benjamin Groven,
Ankit Nalin Mehta,
H. Bender,
Johan Meersschaut,
Thomas Nuytten,
Patrick Verdonck,
Thierry Conard,
Quentin Smets,
T. Schram,
Ben Schoenaers,
A. Stesmans,
Valeri Afanas’ev,
Wilfried Vandervorst,
Marc Heyns,
Matty Caymax,
Iuliana Radu,
Annelies Delabie
Publication year - 2018
Publication title -
chemistry of materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.741
H-Index - 375
eISSN - 1520-5002
pISSN - 0897-4756
DOI - 10.1021/acs.chemmater.8b02924
Subject(s) - nucleation , atomic layer deposition , materials science , crystal (programming language) , crystallinity , tungsten , chemical vapor deposition , chemical engineering , monolayer , crystal growth , crystallography , nanotechnology , chemistry , thin film , metallurgy , composite material , organic chemistry , computer science , engineering , programming language
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