Open AccessDirect Measurements of Half-Cycle Reaction Heats during Atomic Layer Deposition by Calorimetry
Author(s) -
James M. Lownsbury,
James A. Gladden,
Charles T. Campbell,
In S. Kim,
Alex B. F. Martinson
Publication year - 2017
Publication title -
chemistry of materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.741
H-Index - 375
eISSN - 1520-5002
pISSN - 0897-4756
DOI - 10.1021/acs.chemmater.7b01491
Subject(s) - exothermic reaction , calorimetry , calorimeter (particle physics) , atomic layer deposition , chemistry , deposition (geology) , analytical chemistry (journal) , deconvolution , adsorption , amorphous solid , heat capacity , layer (electronics) , thermodynamics , detector , organic chemistry , optics , paleontology , physics , sediment , biology
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