Open AccessRecent Advances in Atomic Layer Deposition
Author(s) -
Neil P. Dasgupta,
HanBoRam Lee,
Stacey F. Bent,
Paul S. Weiss
Publication year - 2016
Publication title -
chemistry of materials
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 3.741
H-Index - 375
eISSN - 1520-5002
pISSN - 0897-4756
DOI - 10.1021/acs.chemmater.6b00673
Subject(s) - atomic layer deposition , layer (electronics) , deposition (geology) , materials science , layer by layer , nanotechnology , geology , paleontology , sediment
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