Open AccessArea-Selective Molecular Layer Deposition of Polyimide on Cu through Cu-Catalyzed Formation of a Crystalline Interchain Polyimide
Author(s) -
Chao Zhang,
Marko Vehkamäki,
Mika Pietikäinen,
Markku Leskelä,
Mikko Ritala
Publication year - 2020
Publication title -
chemistry of materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.741
H-Index - 375
eISSN - 1520-5002
pISSN - 0897-4756
DOI - 10.1021/acs.chemmater.0c00898
Subject(s) - polyimide , pyromellitic dianhydride , selectivity , crystallinity , materials science , x ray photoelectron spectroscopy , catalysis , layer (electronics) , copper , polymer , ion , deposition (geology) , chemical engineering , morphology (biology) , crystallography , chemistry , organic chemistry , nanotechnology , composite material , metallurgy , paleontology , sediment , engineering , biology , genetics
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