Finite Element Analysis of Polymer-encapsulated ZnO Nanowire-based Sensor Array Intended for Pressure Sensing in Biometric Applications | Zendy

Rolanas Daukševičius | Zendy; Rimvydas Gaidys | Zendy; Eoin P. O’Reilly | Zendy; Masoud Seifikar | Zendy

Open Access

Finite Element Analysis of Polymer-encapsulated ZnO Nanowire-based Sensor Array Intended for Pressure Sensing in Biometric Applications

Author(s) -

Rolanas Daukševičius,

Rimvydas Gaidys,

Eoin P. O’Reilly,

Masoud Seifikar

Publication year - 2016

Publication title -

procedia engineering

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.32

H-Index - 74

ISSN - 1877-7058

DOI - 10.1016/j.proeng.2016.11.292

Subject(s) - materials science , finite element method , stack (abstract data type) , nanowire , parametric statistics , pressure sensor , piezoelectricity , modulus , electrode , sensor array , acoustics , optoelectronics , electronic engineering , composite material , mechanical engineering , structural engineering , computer science , engineering , statistics , chemistry , mathematics , physics , machine learning , programming language

This work presents results of finite element analysis of an array of ZnO nanowires with bottom-bottom electrode configuration, which are integrated onto a multi-layer chip stack and encapsulated within a polymer. The dynamically-deformed array constitutes a representative part of a high-resolution pressure sensor intended for reliable identification of the smallest fingerprint features such as shape of the ridges and pores. Parametric study was performed in order to predict the most rational values of the Young's modulus and thickness of the encapsulation layer in terms of magnitude and variability of the piezoelectric signals. The results also demonstrate the impact of nanowire aspect ratio and load orientation on the generated electrical signals

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