Closed-loop Operated Time-Based Accelerometer | Zendy

Rosana A. Dias | Zendy; Pedro Macedo | Zendy; Hélder Silva | Zendy; R.F. Wolffenbuttel | Zendy; Edmond Cretu | Zendy; L.A. Rocha | Zendy

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Closed-loop Operated Time-Based Accelerometer

Author(s) -

Rosana A. Dias,

Pedro Macedo,

Hélder Silva,

R.F. Wolffenbuttel,

Edmond Cretu,

L.A. Rocha

Publication year - 2012

Publication title -

procedia engineering

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.32

H-Index - 74

ISSN - 1877-7058

DOI - 10.1016/j.proeng.2012.09.167

Subject(s) - accelerometer , capacitive sensing , acceleration , sensitivity (control systems) , linearity , dynamic range , range (aeronautics) , control theory (sociology) , computer science , engineering , electronic engineering , electrical engineering , physics , control (management) , aerospace engineering , artificial intelligence , operating system , classical mechanics

A high-resolution, high dynamic range capacitive accelerometer based on pull-in time measurement is described in this paper. The high sensitivity of pull-in time can be used to implement high performance accelerometers, but non-linearity and low dynamic range compromise device performance. A closed-loop approach using an electrostatic actuation mechanism to control the duration of the pull-in time is presented, which addresses the low dynamic range problem. Capacitive parallel-plates structures were used and the preliminary experimental results of closed-loop operation under several acceleration values confirm the potential of this technique and the overall accelerometer concept. The results show an accelerometer with high sensitivity (better than 6 μV/μg) and improved linearity over a large dynamic range.Fundação para a Ciência e a Tecnologia (FCT

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