Enhancement of AlN Slender Piezoelectric Cantilevers Actuation by PECVD Silicon Nitride Coating | Zendy

A.T. Tran | Zendy; G. Pandraud | Zendy; H. Schellevis | Zendy; P.M. Sarro | Zendy

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Enhancement of AlN Slender Piezoelectric Cantilevers Actuation by PECVD Silicon Nitride Coating

Author(s) -

A.T. Tran,

G. Pandraud,

H. Schellevis,

P.M. Sarro

Publication year - 2012

Publication title -

procedia engineering

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.32

H-Index - 74

ISSN - 1877-7058

DOI - 10.1016/j.proeng.2012.09.095

Subject(s) - materials science , silicon nitride , cantilever , deflection (physics) , coating , plasma enhanced chemical vapor deposition , optoelectronics , actuator , nitride , silicon , layer (electronics) , composite material , optics , electrical engineering , engineering , physics

Actuation enhancement for AlN piezoelectric cantilevers is achieved by coating slender AlN beams with a thin PECVD silicon nitride (SiN) layer. Very good linearity and high deflection, up to 19 nm/V of actuation deflection for 200 ?m long cantilevers, at quasi-static mode, is obtained for a 500 nm SiN top layer. This value is three times larger than our previously reported value for cantilevers without the SiN layer. The achieved results make these cantilevers, fabricated in a CMOS compatible process, very promising micro/nano actuators

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