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THz Detection by Thermopile Antenna
Author(s) -
B. Szentpáli,
P. Fürjes,
I. Bársony
Publication year - 2011
Publication title -
procedia computer science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.334
H-Index - 76
ISSN - 1877-0509
DOI - 10.1016/j.procs.2011.09.029
Subject(s) - thermopile , terahertz radiation , microwave , strips , extremely high frequency , antenna (radio) , radiation , optoelectronics , infrared , optics , millimeter , microelectromechanical systems , electromagnetic radiation , sense (electronics) , computer science , physics , electrical engineering , telecommunications , artificial intelligence , engineering
A novel MEMS thermopile structure is presented, which consist of linearly arranged p- and n- type polysilicon strips instead of the conventional loop-like configuration. It is shown that these devices sense the millimeter wave radiation beyond the infrared. The polarity and frequency dependence of the sensitivity prove that these strips behave as absorbing antennas towards the microwave/millimeter wave radiation. The measured responsitivities to direct heating, infrared radiation, 13GHz microwave radiation, 100GHz millimeter-wave and THz radiation are presented

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