Open AccessA thin-film rechargeable battery for integration in stand-alone microsystems
Author(s) -
João Carmo,
R. P. Rocha,
Alexandre Ferreira da Silva,
L.M. Gonçalves,
J. H. Correia
Publication year - 2009
Publication title -
procedia chemistry
Language(s) - English
Resource type - Journals
ISSN - 1876-6196
DOI - 10.1016/j.proche.2009.07.113
Subject(s) - microsystem , anode , materials science , thin film , cathode , battery (electricity) , electrolyte , optoelectronics , lithium (medication) , current collector , self discharge , voltage , sputtering , nanowire battery , engineering physics , electrical engineering , nanotechnology , power (physics) , electrode , lithium vanadium phosphate battery , chemistry , engineering , medicine , physics , quantum mechanics , endocrinology
Thin-film solid-state rechargeable batteries on silicon are ideal power sources for microsystems applications, where a high level of integration is required. This paper presents a lithium solid-state thin-film battery for integration in stand-alone microsystems. The thin-films were deposited by direct current (DC) and radio-frequency (RF) reactive sputtering techniques. The materials of the battery includes SnO2, Li3PO4N and LiCoO2 as anode, electrolyte and cathode, respectively. The SnO2 gives the battery a maximum storage capacity of 781 mAhg-1, the LiCoO2 can maintain a capacity of 140 mAhg-1. The two materials used as anode and cathode with the Li3PO4N as electrolyte can obtain an output voltage in the range 3-4.2 V
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