Heterodyne Interferometer for the Metrological Assurance of the Devices Measuring Physical Properties of Nanostructured Materials | Zendy

А. P. Kuznetsov | Zendy; T. V. Kazieva | Zendy; K L Gubskiy | Zendy; И. И. Маслеников | Zendy; V. N. Reshetov | Zendy

Open Access

Heterodyne Interferometer for the Metrological Assurance of the Devices Measuring Physical Properties of Nanostructured Materials

Author(s) -

А. P. Kuznetsov,

T. V. Kazieva,

K L Gubskiy,

И. И. Маслеников,

V. N. Reshetov

Publication year - 2015

Publication title -

physics procedia

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.26

H-Index - 61

ISSN - 1875-3892

DOI - 10.1016/j.phpro.2015.09.059

Subject(s) - metrology , interferometry , materials science , nanometre , heterodyne (poetry) , nanometrology , traceability , optics , characterization (materials science) , laser , optoelectronics , nanotechnology , acoustics , computer science , physics , software engineering

Nano-hardness tester with three-coordinate laser heterodyne interferometer integrated in the commercially available industrial scanning probe is developed. It allows ensuring traceability of measurements in nanometer range to the primary standard of meter. This device may be used for the characterization of indentor's tips. Corresponding method is presented

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