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Optimized Quadrupole-Octupole C3/C5 Aberration Corrector for STEM
Author(s) -
Niklas Dellby,
Ondrej L. Krivanek,
Matthew F. Murfitt
Publication year - 2008
Publication title -
physics procedia
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.26
H-Index - 61
ISSN - 1875-3892
DOI - 10.1016/j.phpro.2008.07.094
Subject(s) - quadrupole , spherical aberration , optics , physics , beam (structure) , scanning transmission electron microscopy , power (physics) , quadrupole magnet , transmission (telecommunications) , transmission electron microscopy , atomic physics , computer science , quantum mechanics , telecommunications , lens (geology)
We compare different trajectories for C5-free C3 aberration correctors for scanning transmission electron microscopes, and find an asymmetric solution that minimizes the CC contributions and power supply stability requirements compared to a symmetric one. We further study the field aberrations of a C5-free quadrupole-octupole C3 aberration corrector and find that they are similar to those of sextupole C3-correctors in their suitability for wide-beam imaging applications. © 2008 Elsevier B.V. All rights reserved PACS: 41.81.Gy

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