Fabrication of CNT based Gas Sensor Using Interdigitated Gold Electrodes | Zendy

Niraj Kumar | Zendy; Parikshit Sahatiya | Zendy; Pranay Dubey | Zendy

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Fabrication of CNT based Gas Sensor Using Interdigitated Gold Electrodes

Author(s) -

Niraj Kumar,

Parikshit Sahatiya,

Pranay Dubey

Publication year - 2014

Publication title -

procedia materials science

Language(s) - English

Resource type - Journals

ISSN - 2211-8128

DOI - 10.1016/j.mspro.2014.07.232

Subject(s) - materials science , electrode , volumetric flow rate , argon , quartz , sputtering , fabrication , isopropyl alcohol , deposition (geology) , spin coating , coating , analytical chemistry (journal) , composite material , selectivity , flow resistance , optoelectronics , nanotechnology , flow (mathematics) , thin film , chemical engineering , chromatography , alternative medicine , chemistry , pathology , engineering , biology , paleontology , quantum mechanics , medicine , physics , atomic physics , sediment , mathematics , biochemistry , geometry , catalysis

CNTs gas sensor have been fabricated by deposition of CNTs solution with 0.1M isopropyl alcohol using spin coating with 2000rpm speed over interdigitated gold electrode formed by DC sputtering with input of 250V and Argon gas pressure of 5×10-2 mbar. The change in resistance of CNTs with different flow rates of CH4 and NH3 gas was monitored in the quartz tube. During the flow of gas, increase in resistance was observed for 2-4minutes. Resistance declined in the absence of gas. The decline in resistance was more than the original stabilized value when the gas was injected for longer duration of 1.5 hr. The difference in change in resistance pattern for the two different gases predicts the selectivity of the sensor

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