Continuous compliance compensation of position-dependent flexible structures | Zendy

Nikolaos Kontaras | Zendy; Marcel Heertjes | Zendy; Hans Zwart | Zendy

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Continuous compliance compensation of position-dependent flexible structures

Author(s) -

Nikolaos Kontaras,

Marcel Heertjes,

Hans Zwart

Publication year - 2016

Publication title -

ifac-papersonline

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.308

H-Index - 72

eISSN - 2405-8971

pISSN - 2405-8963

DOI - 10.1016/j.ifacol.2016.07.930

Subject(s) - actuator , compensation (psychology) , stiffness , position (finance) , control theory (sociology) , representation (politics) , wafer , computer science , domain (mathematical analysis) , work (physics) , control engineering , mechanical engineering , engineering , structural engineering , mathematics , control (management) , electrical engineering , psychology , mathematical analysis , finance , artificial intelligence , politics , law , psychoanalysis , political science , economics

The implementation of lightweight high-performance motion systems in lithography and other applications imposes lower requirements on actuators, amplifiers, and cooling. However, the decreased stiffness of lightweight designs increases the effect of structural flexibilities especially when the point of interest is not at a fixed location. This is for example occurring when exposing a silicon wafer. The present work addresses the problem of compliance compensation in flexible structures, when the performance location is time-varying. The compliance function is derived using the frequency domain representation of the solution of the partial differential equation (PDE) describing the structure. The method is validated by simulation results

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