Surface Recombination Velocity of Local Al-contacts of PERC Solar Cells Determined from LBIC Measurements and 2D Simulation

Industrial production volumes of passivated emitter and rear contact (PERC) solar cells increase due to significantly higher cell efficiencies compared to full area back surface field (BSF) solar cells at similar costs. The main features of PERC cells are dielectric surface passivation of the rear and local contact formation with Al leading to a p+p junction beneath the Al/eutectic. For non-optimized process conditions, the eutectic in the local Al contact area does not form and so-called voids result. Since it is known that there are voids causing high or low recombination activity, a determination of the surface recombination velocity (SRV) is necessary for identification of the potential for process optimization. The passivation quality of the BSF, locally formed in the rear side contacts, is studied in detail via local internal quantum efficiency (IQE) measured by high resolution light beam induced current (LBIC). The significant spreading of the IQE values is attributed to a variation in local BSF layer thickness at different areas. The SRV of the local contact is determined by fitting the LBIC measurements of voids by 2D simulations. These simulations are based on a detailed modeling of SRV in local contact areas involving a non-uniform SRV in the void's vicinity. The non-uniform SRV in voids is traced back to laser induced damage nearby the local contact opening in the dielectric layer. Additionally the existence of laser damaged areas close to filled contacts is demonstrated in this work