Determination of the Magnitude and Centroid of the Charge in a Thin-film Insulator by CV and Kelvin Probe Measurements | Zendy

Keith R. McIntosh | Zendy; Lachlan E. Black | Zendy; Simeon C. BakerFinch | Zendy; Teng Kho | Zendy; Yimao Wan | Zendy

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Determination of the Magnitude and Centroid of the Charge in a Thin-film Insulator by CV and Kelvin Probe Measurements

Author(s) -

Keith R. McIntosh,

Lachlan E. Black,

Simeon C. BakerFinch,

Teng Kho,

Yimao Wan

Publication year - 2012

Publication title -

energy procedia

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.474

H-Index - 81

ISSN - 1876-6102

DOI - 10.1016/j.egypro.2012.02.019

Subject(s) - insulator (electricity) , materials science , silicon nitride , thin film , capacitance , optoelectronics , kelvin probe force microscope , silicon , analytical chemistry (journal) , chemistry , nanotechnology , electrode , chromatography , atomic force microscopy

This paper describes how capacitance–voltage (CV) and Kelvin probe (KP) measurements can be combined to determine the magnitude and centroid of the electric charge in a thin-film insulator. The technique is demonstrated on three films of relevance to silicon solar cells: aluminium oxide, amorphous silicon nitride and silicon dioxide. Since the charge within these films is of different magnitudes, locations and polarity, they offer a good selection with which to demonstrate the combined CV and KP technique

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