Open AccessThree electrodes touch-mode capacitive pressure sensor
Author(s) -
K.-M. Chang,
G.J. Hwang,
Y.-L. Hsien
Publication year - 1998
Publication title -
microsystem technologies
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.386
H-Index - 63
eISSN - 1432-1858
pISSN - 0946-7076
DOI - 10.1007/s005420050148
Subject(s) - capacitive sensing , electrode , capacitor , sensitivity (control systems) , materials science , pressure sensor , fabrication , planar , optoelectronics , voltage , electrical engineering , pressure measurement , acoustics , electronic engineering , computer science , engineering , physics , mechanical engineering , quantum mechanics , medicine , alternative medicine , computer graphics (images) , pathology
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