LIGA-fabricated compact mm-wave linear accelerator cavities
Author(s) -
J.J. Song,
Sateesh S. Bajikar,
Francesco DeCarlo,
Y.W. Kang,
R.L. Kustom,
Derrick C. Mancini,
A. Nassiri,
Barry Lai,
Alan Feinerman,
Victor White
Publication year - 1998
Publication title -
microsystem technologies
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.386
H-Index - 63
eISSN - 1432-1858
pISSN - 0946-7076
DOI - 10.1007/s005420050129
Subject(s) - electroforming , liga , materials science , lithography , optics , linear particle accelerator , fabrication , electron beam lithography , resist , optoelectronics , polishing , laser , nanotechnology , physics , beam (structure) , composite material , medicine , layer (electronics) , pathology , alternative medicine
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