Process parameters optimization for laser deposition of highT c superconducting thin films on Si and other substrate materials | Zendy

R. D. Vispute | Zendy; S. T. Bendre | Zendy; R. Viswanathan | Zendy; S. M. Chaudhari | Zendy; S. M. Kanetkar | Zendy; S. B. Ogale | Zendy

Open Access

Process parameters optimization for laser deposition of highT c superconducting thin films on Si and other substrate materials

Author(s) -

R. D. Vispute,

S. T. Bendre,

R. Viswanathan,

S. M. Chaudhari,

S. M. Kanetkar,

S. B. Ogale

Publication year - 1991

Publication title -

bulletin of materials science

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.35

H-Index - 72

eISSN - 0973-7669

pISSN - 0250-4707

DOI - 10.1007/bf02747354

Subject(s) - materials science , superconductivity , thin film , excimer laser , substrate (aquarium) , laser ablation , pulsed laser deposition , laser , partial pressure , deposition (geology) , analytical chemistry (journal) , optoelectronics , oxygen , condensed matter physics , optics , nanotechnology , paleontology , oceanography , physics , chemistry , organic chemistry , chromatography , sediment , geology , biology

Thin films of Y-Ba-Cu-O superconductor have been deposited on different substrates by pulsed excimer laser ablation from a superconducting pellet. The dependence of various process parameters such as substrate temperature, laser energy density, oxygen partial pressure, applied bias field and cooling rates on the quality of the films has been studied.

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