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Rare Earth Oxide Thin Films
Author(s) -
M. Fanciulli,
G. Scarel
Publication year - 2006
Publication title -
topics in applied physics
Language(s) - English
Resource type - Book series
eISSN - 1437-0859
pISSN - 0303-4216
DOI - 10.1007/b137342
Subject(s) - microelectronics , thin film , materials science , spintronics , rare earth , oxide , nanotechnology , optoelectronics , engineering physics , metallurgy , engineering , condensed matter physics , physics , ferromagnetism
Thin rare earth (RE) oxide films are emerging materials for microelectronic, nanoelectronic, and spintronic applications. The state-of-the-art of thin film deposition techniques as well as the structural, physical, chemical, and electrical properties of thin RE oxide films and of their interface with semiconducting substrates are discussed. The aim is to identify proper methodologies for the development of RE oxides thin films and to evaluate their effectiveness as innovative materials in different applications

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