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Mechanics of Microelectromechanical Systems
Author(s) -
Nicolae Lobontiu
Publication year - 2005
Publication title -
kluwer academic publishers ebooks
Language(s) - Uncategorized
Resource type - Book series
DOI - 10.1007/b100026
Subject(s) - microelectromechanical systems , computer science , engineering , materials science , nanotechnology

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