Open AccessChemical-Mechanical Planarization of Semiconductor Materials
Author(s) -
Michael R. Oliver
Publication year - 2004
Publication title -
springer series in materials science
Language(s) - Uncategorized
Resource type - Book series
SCImago Journal Rank - 0.154
H-Index - 27
eISSN - 2196-2812
pISSN - 0933-033X
DOI - 10.1007/978-3-662-06234-0
Subject(s) - chemical mechanical planarization , semiconductor , materials science , semiconductor industry , nanotechnology , optoelectronics , engineering , layer (electronics) , manufacturing engineering
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