Open AccessMechanics of Microelectronics
Author(s) -
G. Q. Zhang,
W.D. van Driel,
Xuejun Fan
Publication year - 2006
Publication title -
solid mechanics and its applications
Language(s) - Uncategorized
Resource type - Book series
SCImago Journal Rank - 0.128
H-Index - 24
eISSN - 2214-7764
pISSN - 0925-0042
DOI - 10.1007/1-4020-4935-8
Subject(s) - microelectronics , engineering , mechanics , materials science , engineering ethics , physics , nanotechnology
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