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Study of buried interfaces in Fe/Si multilayer by hard x‐ray emission spectroscopy
Author(s) -
Verma Hina,
Le Guen Karine,
Delaunay Renaud,
Ismail Iyas,
Ilakovac Vita,
Rueff Jean Pascal,
Zheng Yunlin Jacques,
Jonnard Philippe
Publication year - 2021
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.7005
Subject(s) - materials science , spectroscopy , emission spectrum , stack (abstract data type) , x ray spectroscopy , range (aeronautics) , x ray , soft x ray emission spectroscopy , optics , spectral line , physics , composite material , quantum mechanics , astronomy , computer science , programming language
Hard x‐ray emission spectroscopy (XES) has been used to study buried layers and interfaces in a Fe/Si periodic multilayer. Until now, buried layers could be studied using the XES in the soft x‐ray range. Here, we extend the methodology to study the buried interfaces in hard x‐ray region (photon energy ≥ 5 keV). We report the formation of FeSi 2 at all the interfaces with thicknesses of 1.4 nm. X‐ray reflectivity measurements enable us to deduce the structure and thickness of the multilayer stack, thereby confirming the presence of FeSi 2 .