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3D parameter to quantify the anisotropy measurement of periodic structures on rough surfaces
Author(s) -
Guillemot G.,
Bigerelle M.,
Khawaja Z.
Publication year - 2013
Publication title -
scanning
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.359
H-Index - 47
eISSN - 1932-8745
pISSN - 0161-0457
DOI - 10.1002/sca.21108
Subject(s) - anisotropy , materials science , statistical physics , mathematics , optics , physics
Summary In this paper, a new 3D roughness parameter, S reg , is proposed to quantify the regularity of a surface, independent of the amplitude and the SCANNING 36:127–133, 2014. © 2013 Wiley Periodicals, Inc.

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