Open AccessNanopatterning of catalyst by Dip Pen nanolithography (DPN) for synthesis of carbon nanotubes (CNT)
Author(s) -
Kang S.W.,
Banerjee D.,
Kaul A. B.,
Megerian K. G.
Publication year - 2010
Publication title -
scanning
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.359
H-Index - 47
eISSN - 1932-8745
pISSN - 0161-0457
DOI - 10.1002/sca.20184
Subject(s) - nanolithography , carbon nanotube , materials science , dip pen nanolithography , catalysis , nanotechnology , substrate (aquarium) , scanning electron microscope , chemical vapor deposition , silicon , chemical engineering , nanoparticle , carbon nanotube supported catalyst , fabrication , optoelectronics , chemistry , composite material , organic chemistry , carbon nanofiber , medicine , alternative medicine , oceanography , pathology , geology , engineering
Carbon nanotubes (CNT) were synthesized on nanopatterned catalysts. The catalyst nanoparticles were obtained using dip pen nanolithographytechnique. Dip pen nanolithography technique was used to deposit NiCl 2 nanopatterns with sub‐200 nm feature sizes on a silicon substrate. The deposited features were verified by using lateral force microscopy. The substrate was then placed in a plasma‐enhanced chemical vapor deposition instrument to synthesize CNT. The synthesized CNT were characterized using scanning electron microscopy and energy dispersive x‐ray spectroscopy. SCANNING 32: 42–48, 2010. © 2010 Wiley Periodicals, Inc.