Open AccessChemo‐mechanical polish lithography: A pathway to low loss large‐scale photonic integration on lithium niobate on insulator
Author(s) -
Wang Min,
Wu Rongbo,
Lin Jintian,
Zhang Jianhao,
Fang Zhiwei,
Chai Zhifang,
Cheng Ya
Publication year - 2019
Publication title -
quantum engineering
Language(s) - English
Resource type - Journals
ISSN - 2577-0470
DOI - 10.1002/que2.9
Subject(s) - lithium niobate , lithography , photonics , insulator (electricity) , photonic integrated circuit , fabrication , materials science , optoelectronics , integrated optics , photolithography , medicine , alternative medicine , pathology