Open AccessNew Tungsten(VI) Guanidinato Complexes: Synthesis, Characterization, and Application in Metal—Organic Chemical Vapor Deposition of Tungsten Nitride Thin Films.
Author(s) -
Rische Daniel,
Parala Harish,
Gemel Eliza,
Winter Manuela,
Fischer Roland A.
Publication year - 2007
Publication title -
cheminform
Language(s) - English
Resource type - Journals
eISSN - 1522-2667
pISSN - 0931-7597
DOI - 10.1002/chin.200711019
Subject(s) - chemistry , chemical vapor deposition , tungsten , characterization (materials science) , nitride , nanotechnology , deposition (geology) , chemical engineering , organic chemistry , paleontology , materials science , layer (electronics) , sediment , engineering , biology
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