Open AccessMaterials and Processes in UV‐Assisted Nanoimprint Lithography
Author(s) -
M. Zelsmann,
J. Boussey
Publication year - 2011
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Reports
DOI - 10.1002/9783527633449.ch1
Subject(s) - nanoimprint lithography , materials science , nanotechnology , lithography , extreme ultraviolet lithography , optoelectronics , fabrication , medicine , alternative medicine , pathology
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