Open AccessEvaluation of Elastic Properties for Nanoscale Coating Layers Using Ultrasonic Atomic Force Microscopy
Author(s) -
Dong Ryul Kwak,
Seung Bum Cho,
Ik Keun Park
Publication year - 2015
Publication title -
journal of manufacturing engineering and technology/han-guk saengsan jejo siseutem hakoeji
Language(s) - English
Resource type - Journals
eISSN - 2383-4846
pISSN - 2233-6036
DOI - 10.7735/ksmte.2015.24.5.475
Subject(s) - materials science , ultrasonic sensor , cantilever , stiffness , thin film , composite material , nanoscopic scale , coating , sputter deposition , nanomechanics , substrate (aquarium) , atomic force microscopy , contact mechanics , sputtering , nanotechnology , acoustics , structural engineering , finite element method , oceanography , physics , geology , engineering