Open AccessPhase transformation of AlN in AlN/VN nanomultilayers and its effect on the mech anical properties of films
Author(s) -
Jijun Lao,
Xiaoping Hu,
Xinge Yu,
Geyang Li,
GU Mingyuan
Publication year - 2003
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.52.2259
Subject(s) - materials science , superlattice , microstructure , metastability , modulation (music) , epitaxy , phase (matter) , hexagonal crystal system , optoelectronics , crystallography , composite material , layer (electronics) , chemistry , physics , quantum mechanics , philosophy , organic chemistry , aesthetics
AlN/VN nanomultilayers were prepared by reactive magnetron sputtering method. Th e effect of modulation period on the microstructure and mechanical properties of AlN/VN nanomultilayers were studied in this work. The results show that AlN exi sts in metastable cubic structure (c-AlN) at small modulation period and forms c oherent epitaxial grown superlattice with VN. At larger modulation periods, AlN transforms from cubic structure to stable hexagonal structure (h-AlN),and the na nomultilayers form a “brick-wall” structure with nanometer grains. The discuss ion shows that the template effect of VN is beneficial to the growth of c-AlN, b ut cannot increase its critical thickness remarkably.