Open AccessA Study on the Potassium Gettering in Al-1%Si/SiO2/PSG Multilevel Thin Films
Author(s) -
Jin Young Kim
Publication year - 2015
Publication title -
journal of the korean institute of surface engineering
Language(s) - English
Resource type - Journals
eISSN - 2288-8403
pISSN - 1225-8024
DOI - 10.5695/jkise.2015.48.5.233
Subject(s) - getter , thin film , materials science , passivation , potassium , secondary ion mass spectrometry , sputtering , analytical chemistry (journal) , sputter deposition , optoelectronics , ion , chemistry , metallurgy , nanotechnology , layer (electronics) , organic chemistry , chromatography
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