Open AccessIonization and Attachment Coefficients in CF4, CH4, Ar Mixtures Gas
Author(s) -
Sang-Nam Kim
Publication year - 2012
Publication title -
the transactions of the korean institute of electrical engineers p
Language(s) - English
Resource type - Journals
eISSN - 2586-7792
pISSN - 1229-800X
DOI - 10.5370/kieep.2012.61.1.013
Subject(s) - ionization , boltzmann equation , atomic physics , monte carlo method , electron , distribution function , excitation , dissociation (chemistry) , electron ionization , physics , electric field , impact ionization , chemistry , ion , thermodynamics , quantum mechanics , statistics , mathematics
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