Open AccessAn Auto Metrology Sampling Method Considering Quality and Productivity for Semiconductor Manufacturing Process
Author(s) -
Myung-Goo Shin,
Jee-Hyung Lee
Publication year - 2012
Publication title -
jeon-gi hakoe nonmunji/jeon'gi haghoe nonmunji
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.174
H-Index - 11
eISSN - 2287-4364
pISSN - 1975-8359
DOI - 10.5370/kiee.2012.61.9.1330
Subject(s) - semiconductor device fabrication , metrology , sampling (signal processing) , process (computing) , reliability engineering , work in process , scheduling (production processes) , process capability , engineering , process engineering , quality (philosophy) , manufacturing engineering , computer science , wafer , electrical engineering , operations management , statistics , mathematics , philosophy , filter (signal processing) , epistemology , operating system