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In this study, we utilized a sapphire substrate with a matrix protrusion structure as a template. We employed a ZnO gel as a precursor and deposited it onto the substrate using the spin coating method. After undergoing six cycles of deposition and baking, a ZnO seed layer with a thickness of 170 nm was formed. Subsequently, we used a hydrothermal method to grow ZnO nanorods (NRs) on the aforementioned ZnO seed layer for different durations. ZnO NRs exhibited a uniform outward growth rate in various directions, resulting in a hexagonal and floral morphology when observed from above. This morphology was particularly evident in ZnO NRs synthesized for 30 and 45 min. Due to the protrusion structure of ZnO seed layer, the resulting ZnO nanorods (NRs) displayed a floral and matrix morphology on the protrusion ZnO seed layer. To further enhance their properties, we utilized Al nanomaterial to decorate the ZnO nanoflower matrix (NFM) using a deposition method. Subsequently, we fabricated devices using both undecorated and Al-decorated ZnO NFMs and deposited an upper electrode using an interdigital mask. We then compared the gas-sensing performance of these two types of sensors towards CO and H 2 gases. The research findings indicate that sensors based on Al-decorated ZnO NFM exhibit superior gas-sensing properties compared to undecorated ZnO NFM for both CO and H 2 gases. These Al-decorated sensors demonstrate faster response times and higher response rates during the sensing processes.

Synthesis of ZnO Nanoflower Arrays on a Protrusion Sapphire Substrate and Application of Al-Decorated ZnO Nanoflower Matrix in Gas Sensors